Inventor
LIOU HUEY-CHIANG
US9 patents
⚠️ This page may combine multiple inventors who share the name “LIOU HUEY-CHIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
8 patentsUS6995073B2Feb 7, 2006
Air gap integration
INTEL CORP214 citations97
US7125793B2Oct 24, 2006
Method for forming an opening for an interconnect structure in a dielectric layer having a photosensitive material
INTEL CORP23 citations91
US7469443B2Dec 30, 2008
Brush for cleaning wafer
INTEL CORP11 citations83
US6864192B1Mar 8, 2005
Langmuir-blodgett chemically amplified photoresist
INTEL CORP11 citations72
US7071125B2Jul 4, 2006
Precursors for film formation
INTEL CORP8 citations71
US7303985B2Dec 4, 2007
Zeolite-carbon doped oxide composite low k dielectric
INTEL CORP5 citations60
US7391501B2Jun 24, 2008
Immersion liquids with siloxane polymer for immersion lithography
INTEL CORP2 citations57
US7867687B2Jan 11, 2011
Methods and compositions for reducing line wide roughness
INTEL CORP1 citations50