Inventor
DENG HAI
US11 patents
⚠️ This page may combine multiple inventors who share the name “DENG HAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
6 patentsUS6864192B1Mar 8, 2005
Langmuir-blodgett chemically amplified photoresist
INTEL CORP11 citations72
US7303985B2Dec 4, 2007
Zeolite-carbon doped oxide composite low k dielectric
INTEL CORP5 citations60
US7214474B2May 8, 2007
Wash composition with polymeric surfactant
INTEL CORP3 citations60
US7391501B2Jun 24, 2008
Immersion liquids with siloxane polymer for immersion lithography
INTEL CORP2 citations57
US7867687B2Jan 11, 2011
Methods and compositions for reducing line wide roughness
INTEL CORP1 citations50
US7674390B2Mar 9, 2010
Zeolite—sol gel nano-composite low k dielectric
INTEL CORP0 citations50