Inventor
CHOI HOK-KIN
US9 patents
Patents
9 patentsUS7087104B2Aug 8, 2006
Preparation of electroless deposition solutions
INTEL CORP16 citations82
US6864192B1Mar 8, 2005
Langmuir-blodgett chemically amplified photoresist
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US7622305B2Nov 24, 2009
Multiple acid solution characterization
INTEL CORP2 citations59
US7412872B2Aug 19, 2008
Process for screening outgas emissions in semiconductor processing
INTEL CORP2 citations58
US7391501B2Jun 24, 2008
Immersion liquids with siloxane polymer for immersion lithography
INTEL CORP2 citations57
US7375030B2May 20, 2008
Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivity
INTEL CORP0 citations51
US7089785B2Aug 15, 2006
Method to assay sacrificial light absorbing materials and spin on glass materials for chemical origin of defectivity
INTEL CORP0 citations51
US7867687B2Jan 11, 2011
Methods and compositions for reducing line wide roughness
INTEL CORP1 citations50
US7316893B2Jan 8, 2008
Modular containment cell arrangements
INTEL CORP1 citations48