Inventor

MIAO LI YAN

US9 patents

⚠️ This page may combine multiple inventors who share the name “MIAO LI YAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

6 patents

US7972959B2Jul 5, 2011

Self aligned double patterning flow with non-sacrificial features

APPLIED MATERIALS INC20 citations87

US8357618B2Jan 22, 2013

Frequency doubling using a photo-resist template mask

APPLIED MATERIALS INC9 citations84

US9337051B2May 10, 2016

Method for critical dimension reduction using conformal carbon films

APPLIED MATERIALS INC2 citations62

US10014174B2Jul 3, 2018

Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning

APPLIED MATERIALS INC1 citations52

US9659771B2May 23, 2017

Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning

APPLIED MATERIALS INC1 citations52

US8349741B2Jan 8, 2013

Amorphous carbon deposition method for improved stack defectivity

APPLIED MATERIALS INC0 citations51

BALSEANU MIHAELA

1 patent

US8148269B2Apr 3, 2012

Boron nitride and boron-nitride derived materials deposition method

BALSEANU MIHAELA22 citations92

MEBARKI BENCHERKI

1 patent

US8084310B2Dec 27, 2011

Self-aligned multi-patterning for advanced critical dimension contacts

MEBARKI BENCHERKI11 citations81

YU HANG

1 patent

US8227352B2Jul 24, 2012

Amorphous carbon deposition method for improved stack defectivity

YU HANG13 citations79