Inventor
ZHANG GUANGYUN
US12 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG GUANGYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GUO YI
7 patentsUS8492277B2Jul 23, 2013
Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride
GUO YI9 citations82
US8431490B2Apr 30, 2013
Method of chemical mechanical polishing a substrate with polishing composition adapted to enhance silicon oxide removal
GUO YI5 citations71
US8232208B2Jul 31, 2012
Stabilized chemical mechanical polishing composition and method of polishing a substrate
GUO YI3 citations61
US8444728B2May 21, 2013
Stabilized chemical mechanical polishing composition and method of polishing a substrate
GUO YI1 citations51
US8496843B2Jul 30, 2013
Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride
GUO YI0 citations40
US8491808B2Jul 23, 2013
Method of polishing a substrate comprising polysilicon, silicon oxide and silicon nitride
GUO YI0 citations40
US8865013B2Oct 21, 2014
Method for chemical mechanical polishing tungsten
GUO YI0 citations36
LIU ZHENDONG
2 patentsUS8513126B2Aug 20, 2013
Slurry composition having tunable dielectric polishing selectivity and method of polishing a substrate
LIU ZHENDONG5 citations71
US8568610B2Oct 29, 2013
Stabilized, concentratable chemical mechanical polishing composition and method of polishing a substrate
LIU ZHENDONG0 citations40