Inventor
ELSHEREF KHALED A
US8 patents
⚠️ This page may combine multiple inventors who share the name “ELSHEREF KHALED A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7425716B2Sep 16, 2008
Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to a large area electron beam
APPLIED MATERIALS INC14 citations82
US7323399B2Jan 29, 2008
Clean process for an electron beam source
APPLIED MATERIALS INC10 citations81
US7777197B2Aug 17, 2010
Vacuum reaction chamber with x-lamp heater
APPLIED MATERIALS INC7 citations72
US7045798B2May 16, 2006
Characterizing an electron beam treatment apparatus
APPLIED MATERIALS INC4 citations62
US7547643B2Jun 16, 2009
Techniques promoting adhesion of porous low K film to underlying barrier layer
APPLIED MATERIALS INC6 citations59
US7790583B2Sep 7, 2010
Clean process for an electron beam source
APPLIED MATERIALS INC1 citations49
CHAN KELVIN
2 patentsUS8481422B2Jul 9, 2013
Prevention and reduction of solvent and solution penetration into porous dielectrics using a thin barrier layer
CHAN KELVIN6 citations82
US8236684B2Aug 7, 2012
Prevention and reduction of solvent and solution penetration into porous dielectrics using a thin barrier layer
CHAN KELVIN4 citations60