Inventor
LEINENBACH CHRISTINA
DE15 patents
⚠️ This page may combine multiple inventors who share the name “LEINENBACH CHRISTINA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
8 patentsUS7262071B2Aug 28, 2007
Micromechanical component and suitable method for its manufacture
BOSCH GMBH ROBERT20 citations92
US7834409B2Nov 16, 2010
Micromechanical component and corresponding method for its manufacture
BOSCH GMBH ROBERT14 citations83
US9269831B2Feb 23, 2016
Micromechanical functional apparatus, particularly a loudspeaker apparatus, and appropriate method of manufacture
BOSCH GMBH ROBERT11 citations82
US7989263B2Aug 2, 2011
Method for manufacturing a micromechanical chip and a component having a chip of this type
BOSCH GMBH ROBERT5 citations62
US7851248B2Dec 14, 2010
Method for producing a micromechanical component having a thin-layer capping
BOSCH GMBH ROBERT3 citations60
US9517928B2Dec 13, 2016
Micromechanical functional apparatus, particularly a loudspeaker apparatus, and appropriate method of manufacture
BOSCH GMBH ROBERT0 citations50
US8353213B2Jan 15, 2013
Sensor element for sensing accelerations in three spatial directions
BOSCH GMBH ROBERT0 citations49
US8981499B2Mar 17, 2015
MEMS chip package and method for manufacturing an MEMS chip package
BOSCH GMBH ROBERT0 citations40
LAERMER FRANZ
3 patentsUS8182707B2May 22, 2012
Method for etching a layer on a substrate
LAERMER FRANZ3 citations61
US8466042B2Jun 18, 2013
Method for manufacturing separated micromechanical components situated on a silicon substrate and components manufactured therefrom
LAERMER FRANZ2 citations59
US8501516B2Aug 6, 2013
Method for producing micromechanical patterns having a relief-like sidewall outline shape or an adjustable angle of inclination
LAERMER FRANZ0 citations40