Inventor

CHOI THOMAS S

US6 patents

⚠️ This page may combine multiple inventors who share the name “CHOI THOMAS S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

5 patents

US7294580B2Nov 13, 2007

Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition

LAM RES CORP29 citations92

US7226852B1Jun 5, 2007

Preventing damage to low-k materials during resist stripping

LAM RES CORP13 citations82

US7534363B2May 19, 2009

Method for providing uniform removal of organic material

LAM RES CORP3 citations60

US6197388B1Mar 6, 2001

Methods of preventing post-etch corrosion of an aluminum neodymium-containing layer

LAM RES CORP5 citations59

US7385287B2Jun 10, 2008

Preventing damage to low-k materials during resist stripping

LAM RES CORP1 citations50

KANG SEAN S

1 patent

US8815745B2Aug 26, 2014

Reducing damage to low-K materials during photoresist stripping

KANG SEAN S1 citations45