Inventor

TAPPAN JAMES

US9 patents

⚠️ This page may combine multiple inventors who share the name “TAPPAN JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

5 patents

US8038796B2Oct 18, 2011

Apparatus for spatial and temporal control of temperature on a substrate

LAM RES CORP21 citations92

US8735298B2May 27, 2014

Method for spatial and temporal control of temperature on a substrate

LAM RES CORP4 citations83

US8051556B2Nov 8, 2011

Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate

LAM RES CORP4 citations73

US11302556B2Apr 12, 2022

Apparatus for spatial and temporal control of temperature on a substrate

LAM RES CORP0 citations62

US10636689B2Apr 28, 2020

Apparatus for spatial and temporal control of temperature on a substrate

LAM RES CORP0 citations51

METARA INC

2 patents

US6998095B2Feb 14, 2006

Loop dilution system

METARA INC7 citations71

US7132080B2Nov 7, 2006

Module for automated matrix removal

METARA INC4 citations60

RICCI ANTHONY J

1 patent

US8821639B2Sep 2, 2014

Apparatus for spatial and temporal control of temperature on a substrate

RICCI ANTHONY J2 citations56

TAPPAN JAMES

1 patent

US8900404B2Dec 2, 2014

Plasma processing systems with mechanisms for controlling temperatures of components

TAPPAN JAMES2 citations54