Inventor

OKUDA KENTARO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “OKUDA KENTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

1 patent

US5574800ANov 12, 1996

Pattern defect inspection method and apparatus

TOSHIBA KK58 citations94

TOUYA TAKANAO

1 patent

US9036896B2May 19, 2015

Inspection system and method for inspecting line width and/or positional errors of a pattern

TOUYA TAKANAO11 citations82

NUFLARE TECHNOLOGY INC

1 patent

US9406117B2Aug 2, 2016

Inspection system and method for inspecting line width and/or positional errors of a pattern

NUFLARE TECHNOLOGY INC3 citations72

OKUDA KENTARO

1 patent

US8778570B2Jul 15, 2014

Photomask and method for manufacturing the same

OKUDA KENTARO2 citations55