Inventor
URBAN ANDREA
DE12 patents
⚠️ This page may combine multiple inventors who share the name “URBAN ANDREA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
6 patentsUS7149070B2Dec 12, 2006
Holding device, in particular for fixing a semiconductor wafer in a plasma etching device, and method for supplying heat to or dissipating heat from a substrate
BOSCH GMBH ROBERT11 citations83
US7785486B2Aug 31, 2010
Method of etching structures into an etching body using a plasma
BOSCH GMBH ROBERT7 citations73
US7855150B2Dec 21, 2010
Plasma system and method for anisotropically etching structures into a substrate
BOSCH GMBH ROBERT3 citations62
US7642545B2Jan 5, 2010
Layer and system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof
BOSCH GMBH ROBERT3 citations62
US9233843B2Jan 12, 2016
Method for manufacturing a structured surface
BOSCH GMBH ROBERT0 citations50
US11787687B2Oct 17, 2023
Method for manufacturing a micromechanical structure and micromechanical structure
BOSCH GMBH ROBERT0 citations47