Inventor
VAN KAMPEN MAARTEN
NL9 patents
⚠️ This page may combine multiple inventors who share the name “VAN KAMPEN MAARTEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS9482960B2Nov 1, 2016
Pellicle for reticle and multilayer mirror
ASML NETHERLANDS BV14 citations92
US9989844B2Jun 5, 2018
Pellicle for reticle and multilayer mirror
ASML NETHERLANDS BV5 citations84
US10481510B2Nov 19, 2019
Graphene spectral purity filter
ASML NETHERLANDS BV3 citations73
US10359710B2Jul 23, 2019
Radiation system and optical device
ASML NETHERLANDS BV5 citations70
US9773578B2Sep 26, 2017
Radiation source-collector and method for manufacture
ASML NETHERLANDS BV3 citations69
US9606445B2Mar 28, 2017
Lithographic apparatus and method of manufacturing a device
ASML NETHERLANDS BV5 citations68
US12055478B2Aug 6, 2024
Apparatus and method for cleaning an inspection system
ASML NETHERLANDS BV0 citations55