Inventor

YEN RICHARD

TW2 patents

Patents

2 patents

US10829364B2Nov 10, 2020

MEMS transducer and method for manufacturing the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70

US9862592B2Jan 9, 2018

MEMS transducer and method for manufacturing the same

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations49