Inventor
SEITZ HOLGER
DE14 patents
⚠️ This page may combine multiple inventors who share the name “SEITZ HOLGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
7 patentsUS10928332B2Feb 23, 2021
Inspection device for masks for semiconductor lithography and method
ZEISS CARL SMT GMBH3 citations68
US10698318B2Jun 30, 2020
Method and device for characterizing a mask for microlithography
ZEISS CARL SMT GMBH1 citations59
US11867642B2Jan 9, 2024
Inspection device for masks for semiconductor lithography and method
ZEISS CARL SMT GMBH0 citations58
US10788748B2Sep 29, 2020
Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out
ZEISS CARL SMT GMBH1 citations58
US9535244B2Jan 3, 2017
Emulation of reproduction of masks corrected by local density variations
ZEISS CARL SMT GMBH0 citations51
US10539865B2Jan 21, 2020
Method and device for determining an OPC model
ZEISS CARL SMT GMBH0 citations50
US11619882B2Apr 4, 2023
Method and apparatus for characterizing a microlithographic mask
ZEISS CARL SMT GMBH0 citations47
ZEISS CARL AG
3 patentsUS9904060B2Feb 27, 2018
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
ZEISS CARL AG5 citations82
US10168539B2Jan 1, 2019
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
ZEISS CARL AG3 citations71
US10578881B2Mar 3, 2020
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
ZEISS CARL AG0 citations50