Inventor
TRAUTZSCH THOMAS
DE11 patents
⚠️ This page may combine multiple inventors who share the name “TRAUTZSCH THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
3 patentsUS10788748B2Sep 29, 2020
Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out
ZEISS CARL SMT GMBH1 citations58
US10539865B2Jan 21, 2020
Method and device for determining an OPC model
ZEISS CARL SMT GMBH0 citations50
US9869640B2Jan 16, 2018
Method and device for examining a mask
ZEISS CARL SMT GMBH0 citations39