Inventor
PUYGRANIER ANTOINE
DE5 patents
Patents
5 patentsUS10017376B2Jul 10, 2018
MEMS element including a stress decoupling structure and a component including such a MEMS element
BOSCH GMBH ROBERT0 citations50
US9416000B2Aug 16, 2016
Component including two semiconductor elements, between which at least two hermetically sealed cavities are formed and method for establishing a corresponding bonding connection between two semiconductor elements
BOSCH GMBH ROBERT0 citations49
US10900996B2Jan 26, 2021
Micromechanical sensor and method for manufacturing a micromechanical sensor
BOSCH GMBH ROBERT0 citations47
US10656173B2May 19, 2020
Micromechanical structure for an acceleration sensor
BOSCH GMBH ROBERT0 citations47
US10598686B2Mar 24, 2020
Micromechanical z-acceleration sensor
BOSCH GMBH ROBERT0 citations46