Inventor
MENG CHIN-HAN
TW7 patents
Patents
7 patentsUS10529578B2Jan 7, 2020
Method of fabricating semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations69
US9997336B2Jun 12, 2018
Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US10964547B2Mar 30, 2021
Method of fabricating semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10957516B2Mar 23, 2021
Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10654713B2May 19, 2020
Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10273152B2Apr 30, 2019
Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10131539B2Nov 20, 2018
Method for forming micro-electro-mechanical system (MEMS) device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48