Inventor
CHEN JR-SHENG
TW12 patents
Patents
12 patentsUS11615946B2Mar 28, 2023
Baffle plate for controlling wafer uniformity and methods for making the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10529578B2Jan 7, 2020
Method of fabricating semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations69
US9997336B2Jun 12, 2018
Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US12463016B2Nov 4, 2025
Devices and methods for controlling wafer uniformity in plasma-based process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12412734B2Sep 9, 2025
Baffle plate for controlling wafer uniformity and methods for making the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11769652B2Sep 26, 2023
Devices and methods for controlling wafer uniformity in plasma-based process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10964547B2Mar 30, 2021
Method of fabricating semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10957516B2Mar 23, 2021
Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US12062523B2Aug 13, 2024
Methods and systems for cooling plasma treatment components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54
US10654713B2May 19, 2020
Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10273152B2Apr 30, 2019
Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10131539B2Nov 20, 2018
Method for forming micro-electro-mechanical system (MEMS) device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48