Inventor
CHIANG YU-PEI
TW13 patents
Patents
13 patentsUS11615946B2Mar 28, 2023
Baffle plate for controlling wafer uniformity and methods for making the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10529578B2Jan 7, 2020
Method of fabricating semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations69
US9997336B2Jun 12, 2018
Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US12054382B2Aug 6, 2024
Roughness selectivity for MEMS movement stiction reduction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11655138B2May 23, 2023
Roughness selectivity for MEMS movement stiction reduction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12463016B2Nov 4, 2025
Devices and methods for controlling wafer uniformity in plasma-based process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12412734B2Sep 9, 2025
Baffle plate for controlling wafer uniformity and methods for making the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11769652B2Sep 26, 2023
Devices and methods for controlling wafer uniformity in plasma-based process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10964547B2Mar 30, 2021
Method of fabricating semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10957516B2Mar 23, 2021
Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10654713B2May 19, 2020
Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10273152B2Apr 30, 2019
Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10131539B2Nov 20, 2018
Method for forming micro-electro-mechanical system (MEMS) device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48