Inventor
RATTNER MICHAEL
US7 patents
⚠️ This page may combine multiple inventors who share the name “RATTNER MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6849554B2Feb 1, 2005
Method of etching a deep trench having a tapered profile in silicon
APPLIED MATERIALS INC26 citations92
US6846746B2Jan 25, 2005
Method of smoothing a trench sidewall after a deep trench silicon etch process
APPLIED MATERIALS INC36 citations92
US7074723B2Jul 11, 2006
Method of plasma etching a deeply recessed feature in a substrate using a plasma source gas modulated etchant system
APPLIED MATERIALS INC18 citations90
US7618548B2Nov 17, 2009
Silicon-containing structure with deep etched features, and method of manufacture
APPLIED MATERIALS INC7 citations71