P

Inventor

ROGERS JAMES

US113 patents
⚠️ This page may combine multiple inventors who share the name “ROGERS JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

29 patents
US10791617B2Sep 29, 2020

Method of controlling ion energy distribution using a pulse generator with a current-return output stage

APPLIED MATERIALS INC62 citations98
US10685807B2Jun 16, 2020

Creating ion energy distribution functions (IEDF)

APPLIED MATERIALS INC38 citations98
US10555412B2Feb 4, 2020

Method of controlling ion energy distribution using a pulse generator with a current-return output stage

APPLIED MATERIALS INC67 citations98
US10448495B1Oct 15, 2019

Method of controlling ion energy distribution using a pulse generator with a current-return output stage

APPLIED MATERIALS INC63 citations98
US10448494B1Oct 15, 2019

Method of controlling ion energy distribution using a pulse generator with a current-return output stage

APPLIED MATERIALS INC68 citations98
US9947517B1Apr 17, 2018

Adjustable extended electrode for edge uniformity control

APPLIED MATERIALS INC48 citations98
US10923321B2Feb 16, 2021

Apparatus and method of generating a pulsed waveform

APPLIED MATERIALS INC52 citations97
US10916408B2Feb 9, 2021

Apparatus and method of forming plasma using a pulsed waveform

APPLIED MATERIALS INC54 citations97
USD797691SSep 19, 2017

Composite edge ring

APPLIED MATERIALS INC59 citations97
US11284500B2Mar 22, 2022

Method of controlling ion energy distribution using a pulse generator

APPLIED MATERIALS INC21 citations94
US10504702B2Dec 10, 2019

Adjustable extended electrode for edge uniformity control

APPLIED MATERIALS INC14 citations94
US10103010B2Oct 16, 2018

Adjustable extended electrode for edge uniformity control

APPLIED MATERIALS INC34 citations94
US11462389B2Oct 4, 2022

Pulsed-voltage hardware assembly for use in a plasma processing system

APPLIED MATERIALS INC12 citations93
US11948780B2Apr 2, 2024

Automatic electrostatic chuck bias compensation during plasma processing

APPLIED MATERIALS INC7 citations86
US11848176B2Dec 19, 2023

Plasma processing using pulsed-voltage and radio-frequency power

APPLIED MATERIALS INC5 citations86
US11728124B2Aug 15, 2023

Creating ion energy distribution functions (IEDF)

APPLIED MATERIALS INC5 citations86
US11694876B2Jul 4, 2023

Apparatus and method for delivering a plurality of waveform signals during plasma processing

APPLIED MATERIALS INC10 citations86
US11476145B2Oct 18, 2022

Automatic ESC bias compensation when using pulsed DC bias

APPLIED MATERIALS INC10 citations86
US10991556B2Apr 27, 2021

Adjustable extended electrode for edge uniformity control

APPLIED MATERIALS INC11 citations86
US10763081B2Sep 1, 2020

Apparatus and methods for manipulating radio frequency power at an edge ring in plasma process device

APPLIED MATERIALS INC13 citations86
US10685862B2Jun 16, 2020

Controlling the RF amplitude of an edge ring of a capacitively coupled plasma process device

APPLIED MATERIALS INC13 citations86
US10553404B2Feb 4, 2020

Adjustable extended electrode for edge uniformity control

APPLIED MATERIALS INC13 citations86
US11776789B2Oct 3, 2023

Plasma processing assembly using pulsed-voltage and radio-frequency power

APPLIED MATERIALS INC6 citations85
US11699572B2Jul 11, 2023

Feedback loop for controlling a pulsed voltage waveform

APPLIED MATERIALS INC8 citations85
US11462388B2Oct 4, 2022

Plasma processing assembly using pulsed-voltage and radio-frequency power

APPLIED MATERIALS INC6 citations85
US11232933B2Jan 25, 2022

Temperature and bias control of edge ring

APPLIED MATERIALS INC5 citations84
US11177115B2Nov 16, 2021

Dual-level pulse tuning

APPLIED MATERIALS INC8 citations84
US11069504B2Jul 20, 2021

Creating ion energy distribution functions (IEDF)

APPLIED MATERIALS INC7 citations84
US10784089B2Sep 22, 2020

Temperature and bias control of edge ring

APPLIED MATERIALS INC7 citations84

APEEL TECH INC

8 patents

SMITH OPTICS INC

5 patents

IMMERSIVE TECHNOLOGIES INC

2 patents

VALCORE JR JOHN C

1 patent

SHELTER TECHNOLOGIES INC

1 patent

RAI STRATEGIC HOLDINGS INC

1 patent

SCP GEORGE TFE

1 patent

G3 GENUINE GUIDE GEAR INC

1 patent

POARCH BROS INC

1 patent

Showing the top 50 of 113 patents by PatentIndex Score.