Inventor
VAN HANEHEM MATTHEW
US10 patents
Patents
10 patentsUS9783702B1Oct 10, 2017
Aqueous compositions of low abrasive silica particles
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC16 citations83
US10170335B1Jan 1, 2019
Chemical mechanical polishing method for cobalt
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC3 citations71
US10787592B1Sep 29, 2020
Chemical mechanical polishing compositions and methods having enhanced defect inhibition and selectively polishing silicon nitride over silicon dioxide in an acid environment
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC2 citations69
US10626298B1Apr 21, 2020
Chemical mechanical polishing compositions and methods for suppressing the removal rate of amorphous silicon
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC5 citations69
US10954411B2Mar 23, 2021
Chemical mechanical polishing composition and method of polishing silicon nitride over silicon dioxide and simultaneously inhibiting damage to silicon dioxide
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations59
US10584265B2Mar 10, 2020
Aqueous silica slurry and amine carboxylic acid compositions selective for nitride removal in polishing and methods of using them
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations50
US10316218B2Jun 11, 2019
Aqueous silica slurry compositions for use in shallow trench isolation and methods of using them
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations49
US10221336B2Mar 5, 2019
Aqueous silica slurry compositions for use in shallow trench isolation and methods of using them
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations49
US10822524B2Nov 3, 2020
Aqueous compositions of low dishing silica particles for polysilicon polishing
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations46
US10377921B2Aug 13, 2019
Chemical mechanical polishing method for cobalt
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39