Inventor

KABUNE KOTA

JP3 patents

Patents

3 patents

US10818520B2Oct 27, 2020

Substrate treating apparatus and substrate treating method

SCREEN HOLDINGS CO LTD0 citations47

US10056270B2Aug 21, 2018

Substrate treating apparatus and substrate treating method

SCREEN HOLDINGS CO LTD0 citations47

US11114316B2Sep 7, 2021

Substrate treating apparatus

SCREEN HOLDINGS CO LTD0 citations45