Inventor

TAKEDA YUTA

JP6 patents

⚠️ This page may combine multiple inventors who share the name “TAKEDA YUTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CENTRAL GLASS CO LTD

2 patents

US12145857B2Nov 19, 2024

Method for producing tungsten hexafluoride

CENTRAL GLASS CO LTD0 citations57

US10926211B2Feb 23, 2021

Method for purifying fluorine compound gas

CENTRAL GLASS CO LTD1 citations56

TAKEDA YUTA

2 patents

US10754944B2Aug 25, 2020

Processing system, and processing method and program

TAKEDA YUTA0 citations40

US8213274B2Jul 3, 2012

Optical disc reproducing method

TAKEDA YUTA0 citations30

HITACHI INT ELECTRIC INC

1 patent

US10156012B2Dec 18, 2018

Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC3 citations71

GUNJI ISAO

1 patent

US8562751B2Oct 22, 2013

Dry cleaning method of substrate processing apparatus

GUNJI ISAO0 citations46