Inventor
Liao shu ling
TW13 patents
Patents
13 patentsUS11024550B2Jun 1, 2021
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations85
US10304677B2May 28, 2019
Low-k feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US11244823B2Feb 8, 2022
Varying temperature anneal for film and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10748760B2Aug 18, 2020
Varying temperature anneal for film and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12218221B2Feb 4, 2025
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12176206B2Dec 24, 2024
Varying temperature anneal for film and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11908750B2Feb 20, 2024
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11715637B2Aug 1, 2023
Varying temperature anneal for film and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12506001B2Dec 23, 2025
Low-K feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11705327B2Jul 18, 2023
Low-k feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11295948B2Apr 5, 2022
Low-K feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10950431B2Mar 16, 2021
Low-k feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12148672B2Nov 19, 2024
Hybrid fin structure of semiconductor device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50