Inventor
VASANTHA BOPANNA ICHETTIRA
IN6 patents
Patents
6 patentsUS11569069B2Jan 31, 2023
3D printed chamber components configured for lower film stress and lower operating temperature
APPLIED MATERIALS INC0 citations61
US10553473B2Feb 4, 2020
Edge ring for a substrate processing chamber
APPLIED MATERIALS INC1 citations61
US11417561B2Aug 16, 2022
Edge ring for a substrate processing chamber
APPLIED MATERIALS INC0 citations60
US10777391B2Sep 15, 2020
3D printed chamber components configured for lower film stress and lower operating temperature
APPLIED MATERIALS INC0 citations50
US10872749B2Dec 22, 2020
Textured skin for chamber components
APPLIED MATERIALS INC0 citations47
US10435784B2Oct 8, 2019
Thermally optimized rings
APPLIED MATERIALS INC0 citations36