Inventor

GU YIMING

US24 patents

⚠️ This page may combine multiple inventors who share the name “GU YIMING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GU YIMING

INTEGRATED DEVICE TECH

Dynamically coupled metrology and lithography

Method for generating a swing curve and photoresist feature formed using swing curve

Dual-layer deep ultraviolet photoresist process and structure

Dual-wavelength exposure for reduction of implant shadowing

Method for determining photoresist thickness and structure formed using determined photoresist thickness

Method for forming shallow trench isolation structure with anti-reflective liner

ALPHA & OMEGA SEMICONDUCTOR

Split-gate trench power MOSFET with protected shield oxide

Split-gate trench power mosfet with protected shield oxide

Split-gate trench power MOSFET with protected shield oxide

Method for monitoring epitaxial growth geometry shift

SEMICONDUCTOR MFG INT CORP

Method for forming double patterned structure

Exposure device and exposure method

Method of forming double pattern in a structure

Lithography machine and scanning and exposing method thereof

UATC LLC

Systems and methods for interaction-based trajectory prediction

Systems and methods for generating behavioral predictions in reaction to autonomous vehicle movement

ALPHA & OMEGA SEMICONDUCTOR INCORPORATED

Power device with high aspect ratio trench contacts and submicron pitches between trenches

Power device with high aspect ratio trench contacts and submicron pitches between trenches

WU QIANG

Method, optical module and auto-focusing system for wafer edge exposure

Photolithographic apparatus

SEMICONDUCTOR MFG INT SHANGHAI

Cylindrical reticle system, exposure apparatus and exposure method

Exposure apparatus and exposure method thereof

GU YIMING

Gate line edge roughness reduction by using 2P/2E process together with high temperature bake

WU WINSTON

Recycle photochemical to reduce cost of material and environmental impact