Inventor
HORIUCHI TOMOYUKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “HORIUCHI TOMOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
4 patentsUS7705327B2Apr 27, 2010
Beam shot position correction coefficient computation/updating technique for ultrafine pattern fabrication using variable shaped beam lithography
NUFLARE TECHNOLOGY INC8 citations81
US7589335B2Sep 15, 2009
Charged-particle beam pattern writing method and apparatus and software program for use therein
NUFLARE TECHNOLOGY INC12 citations80
US7605383B2Oct 20, 2009
Pattern writing apparatus using charged particle beam, and program-recorded readable recording medium
NUFLARE TECHNOLOGY INC2 citations57
US7844857B2Nov 30, 2010
Writing data processing control apparatus, writing method, and writing apparatus
NUFLARE TECHNOLOGY INC1 citations51