Inventor
NAKAYAMADA NORIAKI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “NAKAYAMADA NORIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
20 patentsUS7705327B2Apr 27, 2010
Beam shot position correction coefficient computation/updating technique for ultrafine pattern fabrication using variable shaped beam lithography
NUFLARE TECHNOLOGY INC8 citations81
US11327408B2May 10, 2022
Writing data generating method and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC2 citations72
US11199781B2Dec 14, 2021
Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium
NUFLARE TECHNOLOGY INC2 citations72
US10685435B2Jun 16, 2020
Drawing data generating method
NUFLARE TECHNOLOGY INC2 citations72
US10410830B2Sep 10, 2019
Charged particle beam apparatus and positional displacement correcting method of charged particle beam
NUFLARE TECHNOLOGY INC2 citations72
US9336988B2May 10, 2016
Multi charged particle beam writing apparatus, and multi charged particle beam writing method
NUFLARE TECHNOLOGY INC3 citations72
US9779913B2Oct 3, 2017
Charged particle beam drawing apparatus and drawing data generation method
NUFLARE TECHNOLOGY INC2 citations71
US9224578B2Dec 29, 2015
Charged particle beam writing apparatus and method for acquiring dose modulation coefficient of charged particle beam
NUFLARE TECHNOLOGY INC6 citations71
US9852885B2Dec 26, 2017
Charged particle beam writing method, and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC2 citations69
US11804361B2Oct 31, 2023
Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording medium
NUFLARE TECHNOLOGY INC0 citations62
US11789372B2Oct 17, 2023
Writing data generating method and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations62
US11774860B2Oct 3, 2023
Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium
NUFLARE TECHNOLOGY INC0 citations62
US10950413B2Mar 16, 2021
Electron beam irradiation method, electron beam irradiation apparatus, and computer readable non-transitory storage medium
NUFLARE TECHNOLOGY INC1 citations62
US10236160B2Mar 19, 2019
Electron beam apparatus and positional displacement correcting method of electron beam
NUFLARE TECHNOLOGY INC1 citations62
US9164044B2Oct 20, 2015
Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing data
NUFLARE TECHNOLOGY INC2 citations62
US12456601B2Oct 28, 2025
Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording medium
NUFLARE TECHNOLOGY INC0 citations61
US11961708B2Apr 16, 2024
Charged particle beam writing apparatus, charged particle beam writing method, and a non-transitory computer-readable storage medium
NUFLARE TECHNOLOGY INC1 citations61
US9484185B2Nov 1, 2016
Charged particle beam writing apparatus, and charged particle beam writing method
NUFLARE TECHNOLOGY INC2 citations60
US9268234B2Feb 23, 2016
Charged particle beam lithography apparatus and charged particle beam pattern writing method
NUFLARE TECHNOLOGY INC0 citations41
US10032603B2Jul 24, 2018
Charged particle beam lithography apparatus and charged particle beam lithography method
NUFLARE TECHNOLOGY INC0 citations38
NAKAYAMADA NORIAKI
4 patentsUS8178856B2May 15, 2012
Charged particle beam writing apparatus and method thereof
NAKAYAMADA NORIAKI22 citations90
US8563953B2Oct 22, 2013
Charged particle beam writing apparatus and charged particle beam writing method
NAKAYAMADA NORIAKI10 citations82
US8129698B2Mar 6, 2012
Charged-particle beam writing method and charged-particle beam writing apparatus
NAKAYAMADA NORIAKI9 citations81
US8502175B2Aug 6, 2013
Charged particle beam pattern forming apparatus and charged particle beam pattern forming method
NAKAYAMADA NORIAKI5 citations71