Inventor
CHEN SHAOFENG
CN10 patents
⚠️ This page may combine multiple inventors who share the name “CHEN SHAOFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS11555250B2Jan 17, 2023
Organic contamination free surface machining
APPLIED MATERIALS INC2 citations67
US11302520B2Apr 12, 2022
Chamber apparatus for chemical etching of dielectric materials
APPLIED MATERIALS INC1 citations61
US11932950B2Mar 19, 2024
Organic contamination free surface machining
APPLIED MATERIALS INC0 citations56
US12497697B2Dec 16, 2025
Layer with discrete islands formed on a substrate support
APPLIED MATERIALS INC0 citations45
US6623605B2Sep 23, 2003
Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck
APPLIED MATERIALS INC1 citations45