Inventor
SHIRAI SEIICHIRO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “SHIRAI SEIICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
7 patentsUS6329112B1Dec 11, 2001
Method for measuring aberration of projection lens, method for forming patterns, mask, and method for correcting a projection lens
HITACHI LTD59 citations96
US5436095AJul 25, 1995
Manufacturing method or an exposing method for a semiconductor device for a semiconductor integrated circuit device and a mask used therefor
HITACHI LTD65 citations96
US5736300AApr 7, 1998
Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor
HITACHI LTD25 citations92
US5405810AApr 11, 1995
Alignment method and apparatus
HITACHI LTD36 citations92
US5578422ANov 26, 1996
Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor
HITACHI LTD15 citations82
US4835089AMay 30, 1989
Resist pattern forming process with dry etching
HITACHI LTD22 citations81
USRE37996EFeb 18, 2003
Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor
HITACHI LTD4 citations62
NITTO DENKO CORP
3 patentsUS5466325ANov 14, 1995
Resist removing method, and curable pressure-sensitive adhesive, adhesive sheets and apparatus used for the method
NITTO DENKO CORP83 citations95
US5959011ASep 28, 1999
Resist removing method, and curable pressure-sensitive adhesive, adhesive sheets and apparatus used for the method
NITTO DENKO CORP17 citations90
US6436220B1Aug 20, 2002
Process for the collective removal of resist material and side wall protective film
NITTO DENKO CORP1 citations52