Inventor

BEKIARIS NIKOLAOS

US24 patents

⚠️ This page may combine multiple inventors who share the name “BEKIARIS NIKOLAOS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BEKIARIS NIKOLAOS

APPLIED MATERIALS INC

Enhanced cobalt agglomeration resistance and gap-fill performance by ruthenium doping

Method of fabricating an ultra low-k dielectric self-aligned via

Integration of ALD/CVD barriers with porous low k materials

Method of forming a dual damascene structure utilizing a three layer hard mask structure

Method of forming a dual damascene structure using an amorphous silicon hard mask

Ionic additives for extreme low dielectric constant chemical formulations

Method of photoresist removal in the presence of a dielectric layer having a low k-value

Ionic additives for extreme low dielectric constant chemical formulations

Gap fill deposition process

Cobalt resistance recovery by hydrogen anneal

Cobalt resistance recovery by hydrogen anneal

Method of dielectric material fill and treatment

Metal based hydrogen barrier

Method of dielectric material fill and treatment

Metal based hydrogen barrier

Method of dielectric material fill and treatment

Microwave anneal to improve CVD metal gap-fill and throughput

Enhanced cobalt agglomeration resistance and gap-fill performance by ruthenium doping

Multi-step process for flowable gap-fill film

Methods and apparatus for processing a substrate

AIR PROD & CHEM

Mesoporous films having reduced dielectric constants

Mesoporous films having reduced dielectric constants

Ionic additives for extreme low dielectric constant chemical formulations

SOKUDO CO LTD

Methods and systems for controlling critical dimensions in track lithography tools