Inventor
SEAMONS MARTIN JAY
US21 patents
⚠️ This page may combine multiple inventors who share the name “SEAMONS MARTIN JAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
16 patentsUS8361906B2Jan 29, 2013
Ultra high selectivity ashable hard mask film
APPLIED MATERIALS INC63 citations96
US8993454B2Mar 31, 2015
Ultra high selectivity doped amorphous carbon strippable hardmask development and integration
APPLIED MATERIALS INC16 citations92
US7407893B2Aug 5, 2008
Liquid precursors for the CVD deposition of amorphous carbon films
APPLIED MATERIALS INC33 citations90
US7867578B2Jan 11, 2011
Method for depositing an amorphous carbon film with improved density and step coverage
APPLIED MATERIALS INC12 citations84
US10580623B2Mar 3, 2020
Plasma processing using multiple radio frequency power feeds for improved uniformity
APPLIED MATERIALS INC3 citations72
US10100408B2Oct 16, 2018
Edge hump reduction faceplate by plasma modulation
APPLIED MATERIALS INC6 citations71
US12543547B2Feb 3, 2026
Method of dielectric material fill and treatment
APPLIED MATERIALS INC0 citations62
US12046508B2Jul 23, 2024
Method of dielectric material fill and treatment
APPLIED MATERIALS INC0 citations62
US11615984B2Mar 28, 2023
Method of dielectric material fill and treatment
APPLIED MATERIALS INC0 citations62
US11469100B2Oct 11, 2022
Methods of post treating dielectric films with microwave radiation
APPLIED MATERIALS INC0 citations62
US11276562B2Mar 15, 2022
Plasma processing using multiple radio frequency power feeds for improved uniformity
APPLIED MATERIALS INC0 citations62
US11133177B2Sep 28, 2021
Oxidation reduction for SiOC film
APPLIED MATERIALS INC1 citations62
US11090683B2Aug 17, 2021
Cure method for cross-linking Si-hydroxyl bonds
APPLIED MATERIALS INC0 citations62
US7094442B2Aug 22, 2006
Methods for the reduction and elimination of particulate contamination with CVD of amorphous carbon
APPLIED MATERIALS INC4 citations57
US10510518B2Dec 17, 2019
Methods of dry stripping boron-carbon films
APPLIED MATERIALS INC0 citations51
US12374584B2Jul 29, 2025
Multi color stack for self aligned dual pattern formation for multi purpose device structures
APPLIED MATERIALS INC0 citations50