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Inventor

LI WEIMIN

CN138 patents
⚠️ This page may combine multiple inventors who share the name “LI WEIMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MICRON TECHNOLOGY INC

41 patents
US6835995B2Dec 28, 2004

Low dielectric constant material for integrated circuit fabrication

MICRON TECHNOLOGY INC226 citations99
US6756293B2Jun 29, 2004

Combined gate cap or digit line and spacer deposition using HDP

MICRON TECHNOLOGY INC495 citations99
US6383951B1May 7, 2002

Low dielectric constant material for integrated circuit fabrication

MICRON TECHNOLOGY INC325 citations99
US6281072B1Aug 28, 2001

Multiple step methods for forming conformal layers

MICRON TECHNOLOGY INC227 citations99
US6218288B1Apr 17, 2001

Multiple step methods for forming conformal layers

MICRON TECHNOLOGY INC542 citations99
US7205248B2Apr 17, 2007

Method of eliminating residual carbon from flowable oxide fill

MICRON TECHNOLOGY INC64 citations98
US6930058B2Aug 16, 2005

Method of depositing a silicon dioxide comprising layer doped with at least one of P, B and Ge

MICRON TECHNOLOGY INC88 citations98
US6613656B2Sep 2, 2003

Sequential pulse deposition

MICRON TECHNOLOGY INC89 citations98
US6198144B1Mar 6, 2001

Passivation of sidewalls of a word line stack

MICRON TECHNOLOGY INC97 citations98
US6156674ADec 5, 2000

Semiconductor processing methods of forming insulative materials

MICRON TECHNOLOGY INC129 citations98
US6368988B1Apr 9, 2002

Combined gate cap or digit line and spacer deposition using HDP

MICRON TECHNOLOGY INC48 citations96
US6140230AOct 31, 2000

Methods of forming metal nitride and silicide structures

MICRON TECHNOLOGY INC42 citations96
US6136690AOct 24, 2000

In situ plasma pre-deposition wafer treatment in chemical vapor deposition technology for semiconductor integrated circuit applications

MICRON TECHNOLOGY INC43 citations96
US7220683B2May 22, 2007

Transparent amorphous carbon structure in semiconductor devices

MICRON TECHNOLOGY INC16 citations93
US7129180B2Oct 31, 2006

Masking structure having multiple layers including an amorphous carbon layer

MICRON TECHNOLOGY INC22 citations93
US7053010B2May 30, 2006

Methods of depositing silicon dioxide comprising layers in the fabrication of integrated circuitry, methods of forming trench isolation, and methods of forming arrays of memory cells

MICRON TECHNOLOGY INC39 citations93
US7018469B2Mar 28, 2006

Atomic layer deposition methods of forming silicon dioxide comprising layers

MICRON TECHNOLOGY INC22 citations93
US6951709B2Oct 4, 2005

Method of fabricating a semiconductor multilevel interconnect structure

MICRON TECHNOLOGY INC35 citations93
US6589611B1Jul 8, 2003

Deposition and chamber treatment methods

MICRON TECHNOLOGY INC27 citations93
US6395647B1May 28, 2002

Chemical treatment of semiconductor substrates

MICRON TECHNOLOGY INC26 citations93
US6323101B1Nov 27, 2001

Semiconductor processing methods, methods of forming silicon dioxide methods of forming trench isolation regions, and methods of forming interlevel dielectric layers

MICRON TECHNOLOGY INC19 citations92
US6982207B2Jan 3, 2006

Methods for filling high aspect ratio trenches in semiconductor layers

MICRON TECHNOLOGY INC20 citations90
US7341957B2Mar 11, 2008

Masking structure having multiple layers including amorphous carbon layer

MICRON TECHNOLOGY INC9 citations84
US7060637B2Jun 13, 2006

Methods of forming intermediate semiconductor device structures using spin-on, photopatternable, interlayer dielectric materials

MICRON TECHNOLOGY INC11 citations84
US7259079B2Aug 21, 2007

Methods for filling high aspect ratio trenches in semiconductor layers

MICRON TECHNOLOGY INC11 citations82
US7855154B2Dec 21, 2010

Methods of forming intermediate semiconductor device structures using spin-on, photopatternable, interlayer dielectric materials

MICRON TECHNOLOGY INC4 citations74
US7678460B2Mar 16, 2010

Intermediate semiconductor device structures using photopatternable, dielectric materials

MICRON TECHNOLOGY INC7 citations74
US7632737B2Dec 15, 2009

Protection in integrated circuits

MICRON TECHNOLOGY INC6 citations74
US7470635B2Dec 30, 2008

Method of depositing a silicon dioxide-comprising layer in the fabrication of integrated circuitry, methods of forming trench isolation in the fabrication of integrated circuitry, methods of depositing silicon dioxide-comprising layers in the fabrication of integrated circuitry, and methods of forming bit line over capacitor arrays of memory cells

MICRON TECHNOLOGY INC5 citations74
US7298024B2Nov 20, 2007

Transparent amorphous carbon structure in semiconductor devices

MICRON TECHNOLOGY INC7 citations74
US7279118B2Oct 9, 2007

Compositions of matter and barrier layer compositions

MICRON TECHNOLOGY INC6 citations74
US7132201B2Nov 7, 2006

Transparent amorphous carbon structure in semiconductor devices

MICRON TECHNOLOGY INC9 citations74
US6828683B2Dec 7, 2004

Semiconductor devices, and semiconductor processing methods

MICRON TECHNOLOGY INC8 citations74
US6815819B2Nov 9, 2004

In situ plasma pre-deposition wafer treatment in chemical vapor deposition technology for semiconductor integrated circuit applications

MICRON TECHNOLOGY INC3 citations74
US6777308B2Aug 17, 2004

Method of improving HDP fill process

MICRON TECHNOLOGY INC9 citations74
US6719919B1Apr 13, 2004

Composition of matter

MICRON TECHNOLOGY INC7 citations74
US6676756B1Jan 13, 2004

Technique for high efficiency metalorganic chemical vapor deposition

MICRON TECHNOLOGY INC6 citations74
US6576538B2Jun 10, 2003

Technique for high efficiency metalorganic chemical vapor deposition

MICRON TECHNOLOGY INC7 citations74
US6573571B2Jun 3, 2003

Semiconductor structure including metal nitride and metal silicide layers over active area and gate stack

MICRON TECHNOLOGY INC9 citations74
US6524975B2Feb 25, 2003

Combined gate cap or digit line and spacer deposition using HDP

MICRON TECHNOLOGY INC12 citations74
US6515363B2Feb 4, 2003

In situ plasma pre-deposition wafer treatment in chemical vapor deposition technology for semiconductor integrated circuit applications

MICRON TECHNOLOGY INC6 citations74

HUNKS WILLIAM

1 patent

MOSAID TECHNOLOGIES INC

1 patent

(unassigned)

1 patent

3COM CORP

1 patent

APPLIED MATERIALS INC

1 patent

LI WEIMIN

1 patent

ZHENG JUN-FEI

1 patent

ENTEGRIS INC

1 patent

CHEN PHILIP S H

1 patent

Showing the top 50 of 138 patents by PatentIndex Score.