Inventor
LI WEIMIN
CN138 patents
⚠️ This page may combine multiple inventors who share the name “LI WEIMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
41 patentsUS6835995B2Dec 28, 2004
Low dielectric constant material for integrated circuit fabrication
MICRON TECHNOLOGY INC226 citations99
US6756293B2Jun 29, 2004
Combined gate cap or digit line and spacer deposition using HDP
MICRON TECHNOLOGY INC495 citations99
US6383951B1May 7, 2002
Low dielectric constant material for integrated circuit fabrication
MICRON TECHNOLOGY INC325 citations99
US6281072B1Aug 28, 2001
Multiple step methods for forming conformal layers
MICRON TECHNOLOGY INC227 citations99
US6218288B1Apr 17, 2001
Multiple step methods for forming conformal layers
MICRON TECHNOLOGY INC542 citations99
US7205248B2Apr 17, 2007
Method of eliminating residual carbon from flowable oxide fill
MICRON TECHNOLOGY INC64 citations98
US6930058B2Aug 16, 2005
Method of depositing a silicon dioxide comprising layer doped with at least one of P, B and Ge
MICRON TECHNOLOGY INC88 citations98
US6613656B2Sep 2, 2003
Sequential pulse deposition
MICRON TECHNOLOGY INC89 citations98
US6198144B1Mar 6, 2001
Passivation of sidewalls of a word line stack
MICRON TECHNOLOGY INC97 citations98
US6156674ADec 5, 2000
Semiconductor processing methods of forming insulative materials
MICRON TECHNOLOGY INC129 citations98
US6368988B1Apr 9, 2002
Combined gate cap or digit line and spacer deposition using HDP
MICRON TECHNOLOGY INC48 citations96
US6140230AOct 31, 2000
Methods of forming metal nitride and silicide structures
MICRON TECHNOLOGY INC42 citations96
US6136690AOct 24, 2000
In situ plasma pre-deposition wafer treatment in chemical vapor deposition technology for semiconductor integrated circuit applications
MICRON TECHNOLOGY INC43 citations96
US7220683B2May 22, 2007
Transparent amorphous carbon structure in semiconductor devices
MICRON TECHNOLOGY INC16 citations93
US7129180B2Oct 31, 2006
Masking structure having multiple layers including an amorphous carbon layer
MICRON TECHNOLOGY INC22 citations93
US7053010B2May 30, 2006
Methods of depositing silicon dioxide comprising layers in the fabrication of integrated circuitry, methods of forming trench isolation, and methods of forming arrays of memory cells
MICRON TECHNOLOGY INC39 citations93
US7018469B2Mar 28, 2006
Atomic layer deposition methods of forming silicon dioxide comprising layers
MICRON TECHNOLOGY INC22 citations93
US6951709B2Oct 4, 2005
Method of fabricating a semiconductor multilevel interconnect structure
MICRON TECHNOLOGY INC35 citations93
US6589611B1Jul 8, 2003
Deposition and chamber treatment methods
MICRON TECHNOLOGY INC27 citations93
US6395647B1May 28, 2002
Chemical treatment of semiconductor substrates
MICRON TECHNOLOGY INC26 citations93
US6323101B1Nov 27, 2001
Semiconductor processing methods, methods of forming silicon dioxide methods of forming trench isolation regions, and methods of forming interlevel dielectric layers
MICRON TECHNOLOGY INC19 citations92
US6982207B2Jan 3, 2006
Methods for filling high aspect ratio trenches in semiconductor layers
MICRON TECHNOLOGY INC20 citations90
US7341957B2Mar 11, 2008
Masking structure having multiple layers including amorphous carbon layer
MICRON TECHNOLOGY INC9 citations84
US7060637B2Jun 13, 2006
Methods of forming intermediate semiconductor device structures using spin-on, photopatternable, interlayer dielectric materials
MICRON TECHNOLOGY INC11 citations84
US7259079B2Aug 21, 2007
Methods for filling high aspect ratio trenches in semiconductor layers
MICRON TECHNOLOGY INC11 citations82
US7855154B2Dec 21, 2010
Methods of forming intermediate semiconductor device structures using spin-on, photopatternable, interlayer dielectric materials
MICRON TECHNOLOGY INC4 citations74
US7678460B2Mar 16, 2010
Intermediate semiconductor device structures using photopatternable, dielectric materials
MICRON TECHNOLOGY INC7 citations74
US7632737B2Dec 15, 2009
Protection in integrated circuits
MICRON TECHNOLOGY INC6 citations74
US7470635B2Dec 30, 2008
Method of depositing a silicon dioxide-comprising layer in the fabrication of integrated circuitry, methods of forming trench isolation in the fabrication of integrated circuitry, methods of depositing silicon dioxide-comprising layers in the fabrication of integrated circuitry, and methods of forming bit line over capacitor arrays of memory cells
MICRON TECHNOLOGY INC5 citations74
US7298024B2Nov 20, 2007
Transparent amorphous carbon structure in semiconductor devices
MICRON TECHNOLOGY INC7 citations74
US7279118B2Oct 9, 2007
Compositions of matter and barrier layer compositions
MICRON TECHNOLOGY INC6 citations74
US7132201B2Nov 7, 2006
Transparent amorphous carbon structure in semiconductor devices
MICRON TECHNOLOGY INC9 citations74
US6828683B2Dec 7, 2004
Semiconductor devices, and semiconductor processing methods
MICRON TECHNOLOGY INC8 citations74
US6815819B2Nov 9, 2004
In situ plasma pre-deposition wafer treatment in chemical vapor deposition technology for semiconductor integrated circuit applications
MICRON TECHNOLOGY INC3 citations74
US6777308B2Aug 17, 2004
Method of improving HDP fill process
MICRON TECHNOLOGY INC9 citations74
US6719919B1Apr 13, 2004
Composition of matter
MICRON TECHNOLOGY INC7 citations74
US6676756B1Jan 13, 2004
Technique for high efficiency metalorganic chemical vapor deposition
MICRON TECHNOLOGY INC6 citations74
US6576538B2Jun 10, 2003
Technique for high efficiency metalorganic chemical vapor deposition
MICRON TECHNOLOGY INC7 citations74
US6573571B2Jun 3, 2003
Semiconductor structure including metal nitride and metal silicide layers over active area and gate stack
MICRON TECHNOLOGY INC9 citations74
US6524975B2Feb 25, 2003
Combined gate cap or digit line and spacer deposition using HDP
MICRON TECHNOLOGY INC12 citations74
US6515363B2Feb 4, 2003
In situ plasma pre-deposition wafer treatment in chemical vapor deposition technology for semiconductor integrated circuit applications
MICRON TECHNOLOGY INC6 citations74
HUNKS WILLIAM
1 patentMOSAID TECHNOLOGIES INC
1 patent(unassigned)
1 patent3COM CORP
1 patentAPPLIED MATERIALS INC
1 patentLI WEIMIN
1 patentZHENG JUN-FEI
1 patentENTEGRIS INC
1 patentCHEN PHILIP S H
1 patentShowing the top 50 of 138 patents by PatentIndex Score.