Inventor

NUMASAWA YOUICHIROU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “NUMASAWA YOUICHIROU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NEC CORP

2 patents

US5256455AOct 26, 1993

Method of forming film of tantalum oxide by plasma chemical vapor deposition

NEC CORP41 citations87

US5306672AApr 26, 1994

Method of manufacturing a semiconductor device wherein natural oxide film is removed from the surface of silicon substrate with HF gas

NEC CORP9 citations68

(unassigned)

1 patent

US6506662B2Jan 14, 2003

Method for forming an SOI substrate by use of a plasma ion irradiation

14 citations81