Inventor
HEO YONG-WOO
KR5 patents
Patents
5 patentsUS6613693B1Sep 2, 2003
Etchant used in the manufacture of semiconductor devices and etching method using the same
SAMSUNG ELECTRONICS CO LTD14 citations80
US6398904B1Jun 4, 2002
Wet etching system for manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD13 citations69
US6960265B2Nov 1, 2005
Apparatus and method for collecting metallic impurity on a semiconductor wafer
SAMSUNG ELECTRONICS CO LTD10 citations68
US7081182B2Jul 25, 2006
Method and apparatus for automatically measuring the concentration of TOC in a fluid used in a semiconductor manufacturing process
SAMSUNG ELECTRONICS CO LTD5 citations58
US6548419B2Apr 15, 2003
Wet etching system for manufacturing semiconductor devices and wet etching method using the same
SAMSUNG ELECTRONICS CO LTD5 citations58