Inventor
LIM HEOUNG-BIN
KR4 patents
Patents
4 patentsUS6613693B1Sep 2, 2003
Etchant used in the manufacture of semiconductor devices and etching method using the same
SAMSUNG ELECTRONICS CO LTD14 citations80
US6398904B1Jun 4, 2002
Wet etching system for manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD13 citations69
US6548419B2Apr 15, 2003
Wet etching system for manufacturing semiconductor devices and wet etching method using the same
SAMSUNG ELECTRONICS CO LTD5 citations58
US6033989AMar 7, 2000
Device for and method of concentrating chemical substances for semiconductor fabrication
SAMSUNG ELECTRONICS CO LTD2 citations57