Inventor
REEVES STEVEN P
US6 patents
Patents
6 patentsUS6660543B1Dec 9, 2003
Method of measuring implant profiles using scatterometric techniques wherein dispersion coefficients are varied based upon depth
ADVANCED MICRO DEVICES INC22 citations92
US6933158B1Aug 23, 2005
Method of monitoring anneal processes using scatterometry, and system for performing same
ADVANCED MICRO DEVICES INC11 citations73
US6927080B1Aug 9, 2005
Structures for analyzing electromigration, and methods of using same
ADVANCED MICRO DEVICES INC10 citations73
US6785009B1Aug 31, 2004
Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing same
ADVANCED MICRO DEVICES INC8 citations72
US6881594B1Apr 19, 2005
Method of using scatterometry for analysis of electromigration, and structures for performing same
ADVANCED MICRO DEVICES INC2 citations62
US7236848B2Jun 26, 2007
Data representation relating to a non-sampled workpiece
ADVANCED MICRO DEVICES INC1 citations50