Inventor

SWENSON DAVID R

US4 patents

⚠️ This page may combine multiple inventors who share the name “SWENSON DAVID R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EPION CORP

2 patents

US7060989B2Jun 13, 2006

Method and apparatus for improved processing with a gas-cluster ion beam

EPION CORP90 citations97

US7067828B2Jun 27, 2006

Method of and apparatus for measurement and control of a gas cluster ion beam

EPION CORP23 citations89

EATON CORP

1 patent

US6137112AOct 24, 2000

Time of flight energy measurement apparatus for an ion beam implanter

EATON CORP44 citations90

AXCHLISRTECHNOLOGIES INC

1 patent

US6291828B1Sep 18, 2001

Glass-like insulator for electrically isolating electrodes from ion implanter housing

AXCHLISRTECHNOLOGIES INC12 citations67