Inventor
FUNG NANCY
US20 patents
⚠️ This page may combine multiple inventors who share the name “FUNG NANCY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS8748322B1Jun 10, 2014
Silicon oxide recess etch
APPLIED MATERIALS INC125 citations97
US7628863B2Dec 8, 2009
Heated gas box for PECVD applications
APPLIED MATERIALS INC20 citations90
US7879183B2Feb 1, 2011
Apparatus and method for front side protection during backside cleaning
APPLIED MATERIALS INC13 citations83
US10954129B2Mar 23, 2021
Diamond-like carbon as mandrel
APPLIED MATERIALS INC3 citations73
US10910381B2Feb 2, 2021
Multicolor approach to DRAM STI active cut patterning
APPLIED MATERIALS INC1 citations73
US11776811B2Oct 3, 2023
Selective deposition of carbon on photoresist layer for lithography applications
APPLIED MATERIALS INC2 citations68
US11527414B2Dec 13, 2022
Methods for etching structures with oxygen pulsing
APPLIED MATERIALS INC3 citations68
US11638374B2Apr 25, 2023
Multicolor approach to DRAM STI active cut patterning
APPLIED MATERIALS INC0 citations62
US11437238B2Sep 6, 2022
Patterning scheme to improve EUV resist and hard mask selectivity
APPLIED MATERIALS INC0 citations62
US11335690B2May 17, 2022
Multicolor approach to DRAM STI active cut patterning
APPLIED MATERIALS INC0 citations62
US12486559B2Dec 2, 2025
Method of metal oxide infiltration into photoresist
APPLIED MATERIALS INC0 citations61
US12374557B2Jul 29, 2025
Methods for etching structures with oxygen pulsing
APPLIED MATERIALS INC0 citations58
US12249509B2Mar 11, 2025
Selective deposition of carbon on photoresist layer for lithography applications
APPLIED MATERIALS INC0 citations58
US11658042B2May 23, 2023
Methods for etching structures and smoothing sidewalls
APPLIED MATERIALS INC0 citations58
US10283370B1May 7, 2019
Silicon addition for silicon nitride etching selectivity
APPLIED MATERIALS INC1 citations58
US10867795B2Dec 15, 2020
Method of etching hardmasks containing high hardness materials
APPLIED MATERIALS INC0 citations50
US12283484B2Apr 22, 2025
Selective deposition of carbon on photoresist layer for lithography applications
APPLIED MATERIALS INC0 citations47
US11658043B2May 23, 2023
Selective anisotropic metal etch
APPLIED MATERIALS INC0 citations46