Inventor
SHIINA YUICHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SHIINA YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIINA YUICHI
3 patentsUS8833299B2Sep 16, 2014
Divided annular rib type plasma processing apparatus
SHIINA YUICHI1 citations45
US8999122B2Apr 7, 2015
Insulator interposed type plasma processing apparatus
SHIINA YUICHI0 citations33
US8562800B2Oct 22, 2013
Plasma generating apparatus and plasma processing apparatus
SHIINA YUICHI0 citations33