Inventor
Talone Christopher
US10 patents
Patents
10 patentsUS10903077B2Jan 26, 2021
Methods to protect nitride layers during formation of silicon germanium nano-wires in microelectronic workpieces
TOKYO ELECTRON LTD3 citations71
US10529589B2Jan 7, 2020
Method of plasma etching of silicon-containing organic film using sulfur-based chemistry
TOKYO ELECTRON LTD4 citations70
US11699741B2Jul 11, 2023
Metal-containing liner process
TOKYO ELECTRON LTD0 citations51
US10529540B2Jan 7, 2020
Advanced methods for plasma systems operation
TOKYO ELECTRON LTD0 citations51
US12009430B2Jun 11, 2024
Method for gate stack formation and etching
TOKYO ELECTRON LTD0 citations50
US11133194B2Sep 28, 2021
Method for selective etching at an interface between materials
TOKYO ELECTRON LTD0 citations50
US11398386B2Jul 26, 2022
Plasma etch processes
TOKYO ELECTRON LTD0 citations48
US10811273B2Oct 20, 2020
Methods of surface restoration for nitride etching
TOKYO ELECTRON LTD0 citations48
US10490404B2Nov 26, 2019
Method of in situ hard mask removal
TOKYO ELECTRON LTD0 citations39
US10204832B2Feb 12, 2019
Method of patterning intersecting structures
TOKYO ELECTRON LTD0 citations39