Inventor
KAITO TAKASHI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “KAITO TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEIKO INSTR INC
11 patentsUS5525806AJun 11, 1996
Focused charged beam apparatus, and its processing and observation method
SEIKO INSTR INC102 citations97
US6395347B1May 28, 2002
Micromachining method for workpiece observation
SEIKO INSTR INC68 citations96
US4876112AOct 24, 1989
Process for forming metallic patterned film
SEIKO INSTR INC97 citations96
US5376883ADec 27, 1994
Analysis of integrated circuit operability using a focused ion beam
SEIKO INSTR INC23 citations92
US5028780AJul 2, 1991
Preparation and observation method of micro-section
SEIKO INSTR INC35 citations92
US5023453AJun 11, 1991
Apparatus for preparation and observation of a topographic section
SEIKO INSTR INC29 citations92
US4930439AJun 5, 1990
Mask-repairing device
SEIKO INSTR INC21 citations82
US4950498AAug 21, 1990
Process for repairing pattern film
SEIKO INSTR INC17 citations74
US4874632AOct 17, 1989
Process for forming pattern film
SEIKO INSTR INC7 citations71
US6544897B2Apr 8, 2003
Method for forming a vertical edge submicron through-hole and a thin film sample with this kind of through-hole
SEIKO INSTR INC5 citations63
US5071671ADec 10, 1991
Process for forming pattern films
SEIKO INSTR INC1 citations50
SII NANOTECHNOLOGY INC
8 patentsUS6864481B2Mar 8, 2005
Probe for scanning probe microscope
SII NANOTECHNOLOGY INC62 citations96
US6797952B2Sep 28, 2004
Scanning atom probe
SII NANOTECHNOLOGY INC25 citations90
US7550723B2Jun 23, 2009
Atom probe apparatus and method for working sample preliminary for the same
SII NANOTECHNOLOGY INC5 citations63
US7326445B2Feb 5, 2008
Method and apparatus for manufacturing ultra fine three-dimensional structure
SII NANOTECHNOLOGY INC5 citations63
US7235783B2Jun 26, 2007
Gas blowing nozzle of charged particle beam apparatus and charged particle beam apparatus as well as working method
SII NANOTECHNOLOGY INC3 citations63
US6740368B2May 25, 2004
Beam shaped film pattern formation method
SII NANOTECHNOLOGY INC2 citations63
US7511289B2Mar 31, 2009
Working method utilizing irradiation of charged particle beam onto sample through passage in gas blowing nozzle
SII NANOTECHNOLOGY INC0 citations52
US7476418B2Jan 13, 2009
Method for fabricating nanometer-scale structure
SII NANOTECHNOLOGY INC1 citations51
KAITO TAKASHI
3 patentsUS8274063B2Sep 25, 2012
Composite focused ion beam device, process observation method using the same, and processing method
KAITO TAKASHI4 citations60
US8269194B2Sep 18, 2012
Composite focused ion beam device, and processing observation method and processing method using the same
KAITO TAKASHI3 citations60
US8728286B2May 20, 2014
Method of manufacturing sample for atom probe analysis by FIB and focused ion beam apparatus implementing the same
KAITO TAKASHI0 citations50