P

Inventor

LEE LIE-QUAN

US12 patents
⚠️ This page may combine multiple inventors who share the name “LEE LIE-QUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

7 patents
US9347872B1May 24, 2016

Meta-model based measurement refinement

KLA TENCOR CORP11 citations83
US10345721B1Jul 9, 2019

Measurement library optimization in semiconductor metrology

KLA TENCOR CORP11 citations81
US10386729B2Aug 20, 2019

Dynamic removal of correlation of highly correlated parameters for optical metrology

KLA TENCOR CORP4 citations72
US10502692B2Dec 10, 2019

Automated metrology system selection

KLA TENCOR CORP3 citations70
US9553033B2Jan 24, 2017

Semiconductor device models including re-usable sub-structures

KLA TENCOR CORP2 citations68
US10732520B1Aug 4, 2020

Measurement library optimization in semiconductor metrology

KLA TENCOR CORP1 citations59
US11562289B2Jan 24, 2023

Loosely-coupled inspection and metrology system for high-volume production process monitoring

KLA TENCOR CORP0 citations50

JIN WEN

2 patents
US8577820B2Nov 5, 2013

Accurate and fast neural network training for library-based critical dimension (CD) metrology

JIN WEN8 citations83
US9607265B2Mar 28, 2017

Accurate and fast neural network training for library-based critical dimension (CD) metrology

JIN WEN5 citations72

PANDEV STILIAN IVANOV

1 patent
US10255385B2Apr 9, 2019

Model optimization approach based on spectral sensitivity

PANDEV STILIAN IVANOV4 citations67

LEE LIE QUAN

1 patent
US11175589B2Nov 16, 2021

Automatic wavelength or angle pruning for optical metrology

LEE LIE QUAN1 citations55

CAO MENG

1 patent
US10895810B2Jan 19, 2021

Automatic selection of sample values for optical metrology

CAO MENG0 citations43