Inventor
MORIOKA IKUHISA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MORIOKA IKUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
6 patentsUS11610798B2Mar 21, 2023
Electrostatic chuck assembly, electrostatic chuck, and focus ring
NGK INSULATORS LTD3 citations71
US11282734B2Mar 22, 2022
Electrostatic chuck and method for manufacturing the same
NGK INSULATORS LTD2 citations71
US7763831B2Jul 27, 2010
Heating device
NGK INSULATORS LTD6 citations61
US7576967B2Aug 18, 2009
Electrostatic chuck
NGK INSULATORS LTD4 citations61
US6728091B2Apr 27, 2004
Electrostatic adsorption device
NGK INSULATORS LTD6 citations60
US12444586B2Oct 14, 2025
Wafer placement table
NGK INSULATORS LTD0 citations50