Inventor
YAN LIFAN
US3 patents
Patents
3 patentsUS11550222B2Jan 10, 2023
Dose reduction of patterned metal oxide photoresists
APPLIED MATERIALS INC3 citations70
US11495461B2Nov 8, 2022
Film stack for lithography applications
APPLIED MATERIALS INC2 citations68
US11994800B2May 28, 2024
Dose reduction of patterned metal oxide photoresists
APPLIED MATERIALS INC0 citations60