Inventor

MIDDLEBROOKS SCOTT ANDERSON

NL48 patents

⚠️ This page may combine multiple inventors who share the name “MIDDLEBROOKS SCOTT ANDERSON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MIDDLEBROOKS SCOTT ANDERSON

ASML NETHERLANDS BV

Methods and apparatus for obtaining diagnostic information relating to an industrial process

Methods and apparatus for obtaining diagnostic information relating to an industrial process

Deep learning for semantic segmentation of pattern

Method and apparatus for image analysis

Method and apparatus for image analysis

Methods and apparatus for obtaining diagnostic information relating to an industrial process

Yield estimation and control

Metrology method and apparatus, lithographic system and device manufacturing method

Method and apparatus for image analysis

Object identification and comparison

Method and apparatus for image analysis

Methods and apparatus for obtaining diagnostic information relating to an industrial process

Displacement based overlay or alignment

Metrology method and apparatus, lithographic system and device manufacturing method

Metrology method and apparatus, lithographic system and device manufacturing method

Inspection methods, inspection apparatuses, and lithographic apparatuses

Yield estimation and control

Inspection method and apparatus, and corresponding lithographic apparatus

Method and apparatus for predicting substrate image

Aligning a distorted image

Methods and apparatus for obtaining diagnostic information relating to an industrial process

Deep learning for semantic segmentation of pattern

Method and apparatus for image analysis

Inspection tool, inspection method and computer program product

Methods and apparatus for obtaining diagnostic information relating to an industrial process

Method and apparatus for image analysis

Source separation from metrology data

Methods and apparatus for obtaining diagnostic information, methods and apparatus for controlling an industrial process

System and method for generating predictive images for wafer inspection using machine learning

Systems and methods for predicting layer deformation

Systems and methods for predicting layer deformation

Method and system for predicting process information with a parameterized model

Method of measuring variation, inspection system, computer program, and computer system

Method of measuring variation, inspection system, computer program, and computer system

Metrology method and apparatus, lithographic system and device manufacturing method

Metrology apparatus and method for determining a characteristic of one or more structures on a substrate

Apparatus and method for determining three dimensional data based on an image of a patterned substrate

MOS EVERHARDUS CORNELIS

Alignment system, lithographic system and method

Optimization method and a lithographic cell

Lithographic system, lithographic method and device manufacturing method

Method for selecting sample positions on a substrate, method for providing a representation of a model of properties of a substrate, method of providing a representation of the variation of properties of a substrate across the substrate and device manufacturing method

MIDDLEBROOKS SCOTT ANDERSON

Method and apparatus for classifying a data point in imaging data

Method and apparatus for estimating model parameters of and controlling a lithographic apparatus by measuring a substrate property and using a polynomial model

Method and apparatus for planning computer-aided diagnosis

Method and apparatus for adaptive computer-aided diagnosis

VAN DE KERKHOF MARCUS ADRIANUS

Inspection apparatus for lithography

PADIY ALEXANDER VIKTOROVYCH

Lithographic apparatus and device manufacturing method

FUCHS ANDREAS

Inspection method and apparatus, and corresponding lithographic apparatus