Inventor
KOOPMAN ADRIANUS CORNELIS MATHEUS
NL22 patents
Patents
22 patentsUS10274834B2Apr 30, 2019
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV15 citations93
US9946165B2Apr 17, 2018
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV19 citations93
US11379970B2Jul 5, 2022
Deep learning for semantic segmentation of pattern
ASML NETHERLANDS BV8 citations85
US10732513B2Aug 4, 2020
Method and apparatus for image analysis
ASML NETHERLANDS BV4 citations84
US10437157B2Oct 8, 2019
Method and apparatus for image analysis
ASML NETHERLANDS BV5 citations84
US10642162B2May 5, 2020
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV8 citations83
US10627723B2Apr 21, 2020
Yield estimation and control
ASML NETHERLANDS BV11 citations83
US11143970B2Oct 12, 2021
Method and apparatus for image analysis
ASML NETHERLANDS BV2 citations73
US10890540B2Jan 12, 2021
Object identification and comparison
ASML NETHERLANDS BV4 citations73
US10607334B2Mar 31, 2020
Method and apparatus for image analysis
ASML NETHERLANDS BV2 citations73
US11940740B2Mar 26, 2024
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV2 citations72
US11119414B2Sep 14, 2021
Yield estimation and control
ASML NETHERLANDS BV5 citations70
US12271114B2Apr 8, 2025
Method and apparatus for predicting substrate image
ASML NETHERLANDS BV1 citations64
US12287584B2Apr 29, 2025
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV0 citations62
US11847570B2Dec 19, 2023
Deep learning for semantic segmentation of pattern
ASML NETHERLANDS BV1 citations62
US11720029B2Aug 8, 2023
Method and apparatus for image analysis
ASML NETHERLANDS BV0 citations62
US11442368B2Sep 13, 2022
Inspection tool, inspection method and computer program product
ASML NETHERLANDS BV1 citations62
US11385550B2Jul 12, 2022
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV0 citations62
US11067901B2Jul 20, 2021
Method and apparatus for image analysis
ASML NETHERLANDS BV1 citations62
US11016397B2May 25, 2021
Source separation from metrology data
ASML NETHERLANDS BV0 citations62
US10539882B2Jan 21, 2020
Methods and apparatus for obtaining diagnostic information, methods and apparatus for controlling an industrial process
ASML NETHERLANDS BV1 citations62
US12112260B2Oct 8, 2024
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV0 citations50