Inventor
VAN KRAAIJ MARKUS GERARDUS MARTINUS MARIA
NL32 patents
⚠️ This page may combine multiple inventors who share the name “VAN KRAAIJ MARKUS GERARDUS MARTINUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
31 patentsUS8760662B2Jun 24, 2014
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV16 citations92
US10732513B2Aug 4, 2020
Method and apparatus for image analysis
ASML NETHERLANDS BV4 citations84
US10437157B2Oct 8, 2019
Method and apparatus for image analysis
ASML NETHERLANDS BV5 citations84
US9958791B2May 1, 2018
Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method
ASML NETHERLANDS BV8 citations84
US10627723B2Apr 21, 2020
Yield estimation and control
ASML NETHERLANDS BV11 citations83
US10146140B2Dec 4, 2018
Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method
ASML NETHERLANDS BV8 citations83
US9910366B2Mar 6, 2018
Metrology method and apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV9 citations83
US11143970B2Oct 12, 2021
Method and apparatus for image analysis
ASML NETHERLANDS BV2 citations73
US10955353B2Mar 23, 2021
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV2 citations73
US10761432B2Sep 1, 2020
Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method
ASML NETHERLANDS BV3 citations73
US10607334B2Mar 31, 2020
Method and apparatus for image analysis
ASML NETHERLANDS BV2 citations73
US10331041B2Jun 25, 2019
Metrology method and apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV1 citations72
US10126662B2Nov 13, 2018
Metrology method and apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations72
US10983445B2Apr 20, 2021
Method and apparatus for measuring a parameter of interest using image plane detection techniques
ASML NETHERLANDS BV3 citations71
US11119414B2Sep 14, 2021
Yield estimation and control
ASML NETHERLANDS BV5 citations70
US10795269B2Oct 6, 2020
Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method
ASML NETHERLANDS BV3 citations70
US11041816B2Jun 22, 2021
Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures
ASML NETHERLANDS BV2 citations67
US12271114B2Apr 8, 2025
Method and apparatus for predicting substrate image
ASML NETHERLANDS BV1 citations64
US11720029B2Aug 8, 2023
Method and apparatus for image analysis
ASML NETHERLANDS BV0 citations62
US11525786B2Dec 13, 2022
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV0 citations62
US11347151B2May 31, 2022
Methods and apparatus for calculating electromagnetic scattering properties of a structure
ASML NETHERLANDS BV0 citations62
US11067901B2Jul 20, 2021
Method and apparatus for image analysis
ASML NETHERLANDS BV1 citations62
US11022900B2Jun 1, 2021
Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method
ASML NETHERLANDS BV0 citations62
US10649345B2May 12, 2020
Methods and apparatuses for measurement of a parameter of a feature fabricated on a substrate
ASML NETHERLANDS BV1 citations62
US12326407B2Jun 10, 2025
Inspection apparatus and inspection method
ASML NETHERLANDS BV0 citations61
US11692948B2Jul 4, 2023
Inspection apparatus and inspection method
ASML NETHERLANDS BV0 citations61
US11429763B2Aug 30, 2022
Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations61
US10592618B2Mar 17, 2020
Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method
ASML NETHERLANDS BV1 citations61
US12493247B2Dec 9, 2025
Method and system for predicting process information with a parameterized model
ASML NETHERLANDS BV1 citations59
US10725386B2Jul 28, 2020
Metrology method and apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV0 citations51
US11982946B2May 14, 2024
Metrology targets
ASML NETHERLANDS BV0 citations50