Inventor

PISARENCO MAXIM

NL25 patents

⚠️ This page may combine multiple inventors who share the name “PISARENCO MAXIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PISARENCO MAXIM

ASML NETHERLANDS BV

Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method

Methods and apparatus for calculating electromagnetic scattering properties of a structure and for estimation of geometrical and material parameters thereof

Method and apparatus for image analysis

Scatterometer and method of scatterometry using acoustic radiation

Method for determining contribution to a fingerprint

Method for determining defectiveness of pattern based on after development image

Method for applying a deposition model in a semiconductor manufacturing process

Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures

Method and apparatus for predicting substrate image

Aligning a distorted image

Scatterometer and method of scatterometry using acoustic radiation

Methods and apparatus for calculating electromagnetic scattering properties of a structure

Method and apparatus for image analysis

Methods and apparatuses for measurement of a parameter of a feature fabricated on a substrate

Method for parameter determination and apparatus thereof

System and method for generating predictive images for wafer inspection using machine learning

Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method

Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method

Method and system for predicting process information with a parameterized model

Method for determining contribution to a fingerprint

Method for decision making in a semiconductor manufacturing process

Method for decision making in a semiconductor manufacturing process

Apparatus and method for determining three dimensional data based on an image of a patterned substrate

PISARENCO MAXIM

Reference library generation method for methods of inspection, inspection apparatus and lithographic apparatus

Method and apparatus for calculating electromagnetic scattering properties of finite periodic structures